X-Ray Metrology in Semiconductor Manufacturing

by D. Keith Bowen and Brian K. Tanner

The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0849339286
• ISBN13: 9780849339288
• Release Date: January 2006
• Publisher: CRC Press
• Length: 296 Pages
• Weight: 1.20 lbs.
• Dimensions: 0.8" x 6.1" x 9.3"