Transport Simulation in Microelectronics

by Alfred Kersch, William J. Morokoff, William J. Morokoff Alfred Kersch

Book Overview

Computer simulation of semiconductor processing equipment and devices requires the use of a wide variety of numerical methods. Of these methods, the Monte Carlo approach is perhaps most fundamentally suited to mod- eling physical events occurring on microscopic scales which are intricately connected to the particle structure of nature. Here physical phenomena can be simulated by following simulation particles (such as electrons, molecules, photons,...

• Format: Paperback
• Language: English
• ISBN: 3034898983
• ISBN13: 9783034898980
• Release Date: September 2011
• Publisher: Birkhauser
• Length: 240 Pages
• Weight: 0.74 lbs.
• Dimensions: 0.5" x 6.0" x 9.0"