The Science and Engineering of Microelectronic Fabrication

by Stephen A. Campbell

Book Overview

The Science and Engineering of Microelectronic Fabrication provides an introduction to microelectronic processing. Geared towards a wide audience, it may be used as a textbook for both first year graduate and upper level undergraduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits including photolithography, plasma and reactive ion etching, ion implantation, diffusion,...

• Format: Hardcover
• Language: English
• ISBN: 0195105087
• ISBN13: 9780195105087
• Release Date: February 1996
• Publisher: Oxford University Press, USA
• Length: 560 Pages
• Weight: 2.55 lbs.
• Dimensions: 1.2" x 7.6" x 9.5"

Customer Reviews

great book for microelectronics especially for grad students

I am a recent graduate and I used this book for my graduate course in school. it is a great book for students. I am not from electronics background and yet this book was easy to follow and learn from.

Microfabrication equipment explained!

I used this text in a senior-level microelectronics fabrication course and rate it highly. It is a thorough and up to date reference for nearly ALL aspects of modern fabrication technology. The fundamentals like wafer growth, diffusion, oxidation and implantation are covered in the first 5 chapters. Some of this material can be overly technical for those with little background, but I found the tables, diagrams and plots quite helpful. The rest of the text is broken into sections on patterning (optical and nonoptical lithography, etching,) thin films (evaporation, sputtering, CVD, epitaxial growth,) and process integration (CMOS, GaAs, device technology, bipolar, MEMS.) Each of the subtopics I noted is given a chapter's worth of coverage, so plenty of detail is presented. I think it's a great technical reference and a definite keeper.

Excellent book on semiconductor microfabrication

I have been using this book since 1997. It is a great book, especially for those with very little knowledge in microelectronics. Reader with non-technical background can easily understand the materials. Lots of picture & diagrams to further enhance understanding. It has helped me with my postgraduate studies, a must for those who wants to know about microelectronics and a good referrence for all.

Comprehensive, detailed and easy to read

This excellent book by Stephen Campbell offers a comprehensive, in-depth look at many areas of microelectronics. It is also written in an easy to read style with a large number of relevant references. I recommend this book to anyone interested in the many areas of microelectronics.

Excellent introduction to modern microfabrication techniques

This is the text book for Mr. Campbell's microfabrication class (advanced undergraduate or graduate level) at the University of Minnesota, that's how I got to know this book. It covers all the different areas of modern microfabrication and puts them in the right context to one another. Any previous knowledge of these topics is not required.