Surface Metrology for Micro- And Nanofabrication

by Wei Gao

Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro-...

• Format: Paperback
• Language: English
• ISBN: 0128178507
• ISBN13: 9780128178508
• Release Date: November 2020
• Publisher: Elsevier
• Length: 448 Pages
• Weight: 1.70 lbs.
• Dimensions: 0.9" x 7.5" x 9.3"