Stress Induced Phenomena in Metallization

by Hidekazu Okabayashi

A volume taken from papers presented at the Workshop on Stress Induced Phenomena in Metallization. This conference has been extended to reflect interest in interconnect metallization. First, the topics in metallization were extended to include problems related to atomic transport for reflow and filling of vias and contact holes, silicadation, and barrier metals. These topics are of particular interest for the development of the quarter-micron metallization...

• Format: Hardcover
• Language: English
• ISBN: 1563966824
• ISBN13: 9781563966828
• Release Date: February 1998
• Publisher: American Institute of Physics
• Length: 519 Pages