Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications

By R. Behrisch, W O Hofer, W Hauffe

Book Overview

Sputtering, the ejection of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This final volume in a three-part review of sputtering deals with the characterization of the sputtered particles and applications of the technique. It will be of interest to researchers in universities and in industry.

• Format: Paperback
• Language: English
• ISBN: 3662311046
• ISBN13: 9783662311042
• Release Date: August 2014
• Publisher: Springer
• Length: 415 Pages
• Weight: 1.34 lbs.
• Dimensions: 0.9" x 6.1" x 9.2"