Spectroscopic Ellipsometry for the In-situ Investigation of Atomic Layer Depositions

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Edition Description

Project Report from the year 2014 in the subject Chemistry - Other, grade: 1.0, Dresden Technical University (Technische Universit t Dresden), course: Semiconductor Technology, language: English, abstract: Atomic Layer Deposition (ALD) is a special type of Chemical Vapor Deposition...

Edition Details

Format:Paperback

Language:English

ISBN:3656923159

Format: Paperback

Condition:

62.35

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Spectroscopic Ellipsometry for the In-situ Inve...

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