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Spectroscopic Ellipsometry for the In-situ Inve... 3656923159 Book Cover

Spectroscopic Ellipsometry for the In-situ Inve...

Edition Description

Project Report from the year 2014 in the subject Chemistry - Other, grade: 1.0, Dresden Technical University (Technische Universit t Dresden), course: Semiconductor Technology, language: English, abstract: Atomic Layer Deposition (ALD) is a special type of Chemical Vapor Deposition...

Edition Details
Format:Paperback
Language:English
ISBN:3656923159
Format: Paperback
Condition:
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