Spectroscopic Ellipsometry for the In-situ Investigation of Atomic Layer Depositions

by Varun Sharma

Project Report from the year 2014 in the subject Chemistry - Other, grade: 1.0, Dresden Technical University (Technische Universit t Dresden), course: Semiconductor Technology, language: English, abstract: Atomic Layer Deposition (ALD) is a special type of Chemical Vapor Deposition (CVD) technique based on self-terminating sequential gas reactions for a conformal and precise growth down to few nanometers range. Ideally due to the self-terminating...

• Format: Paperback
• Language: English
• ISBN: 3656923159
• ISBN13: 9783656923152
• Release Date: April 2015
• Publisher: Grin Verlag
• Length: 112 Pages
• Weight: 0.34 lbs.
• Dimensions: 0.3" x 5.8" x 8.3"