Solid-State Physics, Fluidics, and Analytical Techniques in Micro- And Nanotechnology

by Marc J. Madou

Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS...

• Format: Hardcover
• Language: English
• ISBN: 1420055119
• ISBN13: 9781420055115
• Release Date: June 2011
• Publisher: CRC Press
• Length: 656 Pages
• Weight: 4.45 lbs.
• Dimensions: 1.1" x 8.9" x 11.2"