Semiconductor Material and Device Characterization

by Dieter K. Schroder

Book Overview

The first book devoted to modern techniques of semiconductor characterization, this comprehensive guide to semiconductor measurement methods is detailed enough for a two-term graduate course. Organized for quick access so that it can be used as a handbook of specific characterization techniques. Processes are characterized through the use of test structures and the main techniques used within the semiconductor industry are thoroughly explained. While the majority of the book is devoted to widely used electrical characterization methods, the more specialized optical, chemical and physical methods are also covered. Contains over 1,300 references.

• Format: Hardcover
• Language: English
• ISBN: 0471511048
• ISBN13: 9780471511045
• Release Date: July 1990
• Publisher: Wiley-Interscience
• Length: 624 Pages
• Weight: 2.15 lbs.
• Dimensions: 1.2" x 6.5" x 9.5"

Customer Reviews

Essential text

This is an essential text for engineers, scientists, and graduate students working in the semiconductor field. It contains a thorough review of all major electrical, optical, and physical characterization methods that are commonly used. Descriptions of techniques are generally conceptually oriented, clearly stated, and do not rely excessively on equations. In addition, many useful figures are included to help explain concepts when introduced. Up to date references are included for essentially every technique mentioned.

Great reference

Schroder has compiled an extensive and very nearly complete guide to modern characterization techniques that apply mostly to semiconductors and solid state devices, but also to techniques used in general materials analysis. We used this text in a graduate level course in EE and found it easy to read through and concise for use as a quick reference. Well worth the money.

Semiconductor Material and Device Characterization

This book offers an outstanding review of various techniques of semiconductor device processing. It is the type of book that is an invaluable reference to the device engineer. It's breadth is outstanding.