Semiconductor Industrial Hygiene Handbook: Monitoring, Ventiliation, Equipment and Ergonomics

by Paul C. Manz and Michael E. Williams

Book Overview

This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0815513690
• ISBN13: 9780815513698
• Release Date: January 1996
• Publisher: William Andrew
• Length: 363 Pages
• Weight: 1.88 lbs.
• Dimensions: 1.1" x 6.4" x 9.6"