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Paperback Rapid Thermal Processing of Semiconductors Book

ISBN: 148991806X

ISBN13: 9781489918062

Rapid Thermal Processing of Semiconductors (Microdevices)

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Format: Paperback

Condition: New

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Book Overview

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

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