Rapid Thermal Annealing/Chemical Vapor Deposition and Integrated Processing: Volume 146

by Martin I. Green and Jeffrey C. Gelpey

No Synopsis Available.

• Format: Hardcover
• Language: English
• ISBN: 1558990194
• ISBN13: 9781558990197
• Release Date: November 1989
• Publisher: Cambridge University Press
• Length: 520 Pages
• Weight: 2.20 lbs.
• Dimensions: 1.4" x 6.2" x 9.2"