Quantitative Data Processing in Scanning Probe Microscopy: Spm Applications for Nanometrology

by Petr Klapetek and Petr Klapetek

Book Overview

Accurate measurement at the nano-scale - nanometrology - is a critical tool for advanced nanotechnology applications, where exact quantities and engineering precision are beyond the capabilities of traditional measuring techniques and instruments. Scanning Probe Microscopy (SPM) builds up a picture of a specimen by scanning with a physical probe; unrestrained by the wavelength of light or electrons, the resolution obtainable with this technique can...

• Format: Hardcover
• Language: English
• ISBN: 1455730580
• ISBN13: 9781455730582
• Release Date: December 2012
• Publisher: William Andrew
• Length: 336 Pages
• Weight: 1.55 lbs.
• Dimensions: 1.0" x 7.6" x 9.4"