Predictive Simulation of Semiconductor Processing: Status and Challenges

by Jarek Dabrowski

Book Overview

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current...

• Format: Hardcover
• Language: English
• ISBN: 3540204814
• ISBN13: 9783540204817
• Release Date: May 2004
• Publisher: Springer
• Length: 490 Pages
• Weight: 2.35 lbs.
• Dimensions: 1.5" x 6.5" x 9.7"