Polymeric Materials for Microelectronic Applications: Science and Technology

by Kazuyuki Horie, Hiroshi Ito, Seiichi Tagawa

Reports recent developments in polymer science and technology pertinent to microelectronics. Addresses such topics as photophysics and radiation physics and chemistry of polymers; photoresists, electron beam resists, and X-ray resists; insulating materials in microelectronics; photoresponsive materials; silicon-containing polymers; conducting polymers; and optoelectronic materials. Includes international contributions from both academia and industry...

• Format: Hardcover
• Language: English
• ISBN: 0841230552
• ISBN13: 9780841230552
• Release Date: May 1995
• Publisher: American Chemical Society
• Length: 540 Pages
• Weight: 1.72 lbs.
• Dimensions: 1.1" x 6.2" x 9.1"