Polycrystalline Silicon for Integrated Circuits and Displays

by Theodore I. Kamins and Ted Kamins

Polycrystalline Silicon for Integrated Circuits and Displays, Second Edition presents much of the available knowledge about polysilicon. It represents an effort to interrelate the deposition, properties, and applications of polysilicon. By properly understanding the properties of polycrystalline silicon and their relation to the deposition conditions, polysilicon can be designed to ensure optimum device and integrated-circuit performance.
Polycrystalline...

• Format: Hardcover
• Language: English
• ISBN: 0792382242
• ISBN13: 9780792382249
• Release Date: July 1998
• Publisher: Springer
• Length: 378 Pages
• Weight: 1.72 lbs.
• Dimensions: 1.1" x 6.4" x 9.6"

Customer Reviews

Great book about Poly

This is the essential book about poly if your life, like mine, revolves entirely around poly. This well-written book contains basic information on the deposition, film properties, and electrical characteristics of poly-Si, as well as the techniques used to analyze poly-Si. The references are invaluable. There has been substantial development on the application of poly, like logic gate electrode, and on single-wafer deposition since this book was published, but I would not start reading the latest literature without reading Kamins first. I wish every step in the chip manufacturing process had as thurough a treatment as poly-Si gets here.