Polycrystalline Silicon for Integrated Circuit Applications

by Theodore I. Kamins and Ted Kamins

Book Overview

Recent years have seen silicon integrated circuits enter into an increasing number of technical and consumer applications, until they now affect everyday life, as well as technical areas. Polycrystalline silicon has been an important component of silicon technology for nearly two decades, being used first in MOS integrated circuits and now becoming pervasive in bipolar circuits, as well. During this time a great deal of informa- tion has been published...

• Format: Hardcover
• Language: English
• ISBN: 0898382599
• ISBN13: 9780898382594
• Release Date: January 1988
• Publisher: Springer
• Length: 290 Pages
• Weight: 1.50 lbs.
• Dimensions: 1.2" x 6.5" x 9.5"