Plasma Polymerization Processes

by Yoshihito Osada and Hynek Biederman

Hardbound. The aim of this book is to show how to make useful plasma polymerization processes resulting in polymeric (organic) materials - usually thin films of the desirable properties. The main emphasis is on the detailed discussion of the deposition apparatus, deposition parameters and properties of the obtained films.The historical background and the processes related to plasma polymerization are discussed. Fundamentals of plasma physics and plasma chemistry are concisely reviewed and used as a base for the explanation of plasma polymerization principles and its models. Special attention is devoted to the real plasma polymerization reactors and various polymer film deposition arrangements. Many technical details are examined including the influence of process parameters on the properties of the resulting plasma polymers. New systems based on a microwave discharge are also described.The properties of the most important plasma polymers - plasma poly

• Format: Hardcover
• Language: English
• ISBN: 0444887245
• ISBN13: 9780444887245
• Release Date: April 1992
• Publisher: Elsevier Science & Technology
• Length: 210 Pages