Particle Beam Microanalysis: Fundamentals, Methods and Applications

by Hans Rehme, Ekkehard Fuchs, Helmut Oppolzer

Particle beam methods of microanalysis allow high lateral and vertical resolution, high sensitivity, low detection limits, and high accuracy. This book concentrates on methods which complement each other and can be routinely applied in industrial laboratories: scanning and transmission electron microscopy, electron beam X-ray microanalysis, Auger electron microanalysis, and ion beam microanalysis as well as electron beam testing. The principal aim...

• Format: Hardcover
• Language: English
• ISBN: 3527268847
• ISBN13: 9783527268849
• Release Date: December 1990
• Publisher: Wiley-VCH Verlag GmbH
• Length: 508 Pages