Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications

by Ivo Utke, Phillip Russell, Stanislav Moshkalev

Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices.

The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions...

• Format: Hardcover
• Language: English
• ISBN: 0199734216
• ISBN13: 9780199734214
• Release Date: May 2012
• Publisher: Oxford University Press, USA
• Length: 840 Pages
• Weight: 4.14 lbs.
• Dimensions: 1.7" x 7.2" x 10.1"