Multilayer Integrated Film Bulk Acoustic Resonators

by Da Chen and Yafei Zhang

Book Overview

Introduction.- Propagation of Acoustic Wave in Crystals.- The Theory of FBAR.- The Sputtering Deposition and Etching of AlN Film.- The Membrane Structured FBAR.- Solidly Mounted Acoustic Resonator.- The Application of FBAR in RF Filters.- The FBAR Excited by Lateral Filed.- High Sensitive Sensors Based on FBAR.

• Format: Paperback
• Language: English
• ISBN: 3642427553
• ISBN13: 9783642427558
• Release Date: September 2014
• Publisher: Springer
• Length: 154 Pages
• Weight: 0.53 lbs.
• Dimensions: 0.3" x 6.1" x 9.2"