Microwave Excited Plasmas: Volume 4

by M. Moisan and J. Pelletier

The contrasting examples of microwave plasmas given in this volume demonstrate their capability of not only covering the totality of expressed needs in that particular field, but in many others. For example the ions and reactive neutral species, indispensable for the synergetic effects in etching and deposition processes can be used in metallurgical treatment, and for materials processing in general. They also have the ability to dissociate molecules...

• Format: Hardcover
• Language: English
• ISBN: 0444888152
• ISBN13: 9780444888150
• Release Date: November 1992
• Publisher: Elsevier Science
• Length: 540 Pages
• Weight: 2.48 lbs.
• Dimensions: 1.5" x 7.4" x 10.3"