Microsystem Technology

by Oliver Paul, Jürgen Mohr, Wolfgang Menz

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

• Format: Hardcover
• Language: English
• ISBN: 3527296344
• ISBN13: 9783527296347
• Release Date: February 2001
• Publisher: Wiley-Vch
• Length: 512 Pages
• Weight: 2.42 lbs.
• Dimensions: 1.2" x 7.0" x 9.5"