Micromachined Thin-Film Sensors for Soi-CMOS Co-Integration

by Jean-Pierre Raskin, Jean Laconte, Denis Flandre

Book Overview

Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost.

Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric...

• Format: Paperback
• Language: English
• ISBN: 1441939571
• ISBN13: 9781441939579
• Release Date: October 2010
• Publisher: Springer
• Length: 292 Pages
• Weight: 0.96 lbs.
• Dimensions: 0.7" x 6.1" x 9.2"