Microlithography: Science and Technology

By: Pamela Arlov

This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discussions on electron beam, x-ray, and proximal probe techniques and enhanced with timesaving citations to key sources in the literature and more than 600 tables, equations, drawings, and photographs that clarify the material, the book covers mechanical systems, optics, excimer laser light sources, alignment techniques and analysis, resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, metrology, and more. This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0824799534
• ISBN13: 9780824799533
• Release Date: May 1998
• Publisher: CRC Press
• Length: 800 Pages
• Weight: 2.40 lbs.
• Dimensions: 9.5" x 1.5" x 6.5"

Customer Reviews

best book for the pro

this book consists almost everything u need to be a lithographer and is also concise and up-to-date!also the price is not too high.good book!

E-beam Lithography

The book provides a great overview of the Electron Beam Lithography, which was the material of interest for me. Material is conveyed in great detail while the meaning of the material is not necessarily constricted to the experts. As an undergraduate student, I found the material readable. I was also able to understand most of the information well and as a result I believe I have a good base of knowledge about lithography...

Great Text Book for Microlithography

The book give a very good overview of what microlithography is and it gives the recent advances in the field. I highly recommend it as something very good to have if your into the field of lithography and especially if you are a non engineer.

Very up to date information from leaders in the field.

I teach a graduate class in Microlithography and this is the best text I have seen to date. It contains all the modern techniques presented in an easy to read format. I highly recommend this text for all process engineers in the field or engineers wishing to learn more about this integrated circuit processing technique.

Excellent reference text for the lithographer!

Microlithography: Science and Technology has been a valuable reference text. I would recommend this book be on the desk of anyone in the field of microlithography.