Microlithography: Science and Technology

By: Pamela Arlov

Book Overview

This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0824799534
• ISBN13: 9780824799533
• Release Date: May 1998
• Publisher: CRC Press
• Length: 800 Pages
• Weight: 2.40 lbs.
• Dimensions: 9.5" x 1.5" x 6.5"