Micro and Nanomanufacturing

by Mark J. Jackson

Book Overview

Principles of Micro- and Nanofabrication.- Microfabrication Using X- ray Lithography.- Manufacturing High Aspect Ratio Microstructures.- Meso-Micromachining.- Mechanical Micromachining.- Microgrinding.- Diamond Microcutting Tools.- Laser Micro- and Nanofabrication.- Micromachining Using Pulsed Water Droplets.- Diamond Nanogrinding.- Nanomachining.- Micro-and Nanomanufacturing.

• Format: Paperback
• Language: English
• ISBN: 1441938451
• ISBN13: 9781441938459
• Release Date: October 2010
• Publisher: Springer
• Length: 702 Pages
• Weight: 2.16 lbs.
• Dimensions: 1.7" x 6.1" x 9.1"