Micro- And Nano-Electro-Mechanical Resonant Transistors

By Adrian Ionescu and Daniel Grogg

Describes state-of-the-art resonant transistors, including a review of their potential applications This book explains the design, analysis and application of hybrid Microelectromechanical systems (MEMS) and Complementary Metal-Oxide-Semiconductor (CMOS) resonator devices; currently a hot topic in the semiconductor industry. It also presents the technology, design and modelling of state-of-the-art resonant transistors and their applications as a micromechanical resonator with internal gain, with a particular focus on time and frequency reference applications. Includes state-of-the-art reviews and selected lists of references in each chapter. Provides descriptions of basic physics for Field-effect Transistor (FET) based motion detection. Reports existing technology solutions to implement movable FETs for in-plane and out-of-plane motion detection. Highlights the main differences with the existing solid-state technology and provides engineering solutions for fast and successful implementation. Discusses the potential of the technology compared to other known transduction principles.

• Format: Hardcover
• Language: English
• ISBN: 1119972434
• ISBN13: 9781119972433
• Release Date: September 2022
• Publisher: Wiley-IEEE Press
• Length: 256 Pages
• Dimensions: 6.6" x 9.6"