Metrology, Inspection, and Process Control for Microlithography Xiii: 15-18 March, 1999, Santa Clara, California (Proceedings of Spie--the International Society for Optical Engineering, V. 3677.)

By Bhanwar Singh, Society of Photo-optical Instrumentation Engineers, Semiconductor Equipm

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• Format: Paperback
• Language: English
• ISBN: 0819431516
• ISBN13: 9780819431516
• Release Date: June 1999
• Publisher: Society of Photo Optical
• Length: 1052 Pages
• Weight: 5.50 lbs.
• Dimensions: 10.8" x 2.3" x 8.3"