Metal Impurities in Silicon- And Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact

by Cor Claeys and Eddy Simoen

This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices' performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for...

• Format: Paperback
• Language: English
• ISBN: 3030067475
• ISBN13: 9783030067472
• Release Date: January 2019
• Publisher: Springer
• Length: 438 Pages
• Weight: 1.45 lbs.
• Dimensions: 0.9" x 6.1" x 9.2"