MEMS and NEMS: Systems, Devices, and Structures

by Sergey E. Lyshevski and Sergey Edward Lyshevski

The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including...

• Format: Hardcover
• Language: English
• ISBN: B00DHLGL66
• ISBN13: 9780849312625
• Release Date: January 2002
• Publisher: CRC Press
• Length: 461 Pages
• Weight: 1.88 lbs.
• Dimensions: 1.4" x 6.4" x 9.6"