Mems: A Practical Guide of Design, Analysis, and Applications

By Jan G. Korvink

Book Overview

A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.

• Format: Paperback
• Language: English
• ISBN: 3662568357
• ISBN13: 9783662568354
• Release Date: March 2019
• Publisher: Springer
• Length: 965 Pages
• Weight: 3.00 lbs.
• Dimensions: 1.9" x 6.1" x 9.2"