Mechanics of Microelectromechanical Systems

by Ephrahim Garcia and Nicolae Lobontiu

This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion,...

• Format: Hardcover
• Language: English
• ISBN: 1402080131
• ISBN13: 9781402080135
• Release Date: September 2004
• Publisher: Springer
• Length: 405 Pages
• Weight: 1.85 lbs.
• Dimensions: 0.8" x 6.5" x 9.6"