Materials Science and Technology, Processing of Semiconductors

by Kenneth A. Jackson and Robert W. Cahn

This self-contained handbook deals with the enabling materials technology for the electronics industry. World renowned authors have contributed to this unique treatment of the processing of semiconductors and related technologies. Contents: Wilkes: Silicon Processing. Mullin: Compound Semiconductor Processing, Kuech/BleLagally/Tischler: Epitaxial Growth. Leuschner/Pawlowski: Photolithography. Griffin: Doping. Turner/Donohoe: Etching Processes in Semiconductor Manufacturing. Chang/Sze: Silicon Device Structures. Lam/Stanchina: Compound Semiconductor Device Structures. Kwong: Silicon Device Processing. Parsey, Jr: Compound Semiconductor Device Processing. Amey: Chip Carriers. Knausenberger/Turlik: Interconnection Systems.

• Format: Paperback
• Language: English
• ISBN: 3527268294
• ISBN13: 9783527268290
• Release Date: February 1997
• Publisher: Wiley-VCH Verlag GmbH
• Length: 715 Pages