Materials and Failures in Mems and Nems

by Baldev Raj

The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 1119083605
• ISBN13: 9781119083603
• Release Date: October 2015
• Publisher: Wiley-Scrivener
• Length: 432 Pages
• Weight: 2.00 lbs.
• Dimensions: 1.1" x 7.2" x 10.1"