Lecture Notes on Principles of Plasma Processing

by Francis F. Chen and Jane P. Chang

Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 0306474972
• ISBN13: 9780306474972
• Release Date: January 2003
• Publisher: Springer
• Length: 208 Pages
• Weight: 1.00 lbs.
• Dimensions: 0.5" x 8.3" x 11.0"