Ion Sources

by H. Zhang and Huashun Zhang

Book Overview

This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing. It appeals to physicists, engineers and advanced students active in ion implantation and ion beam physics.

• Format: Paperback
• Language: English
• ISBN: 3642085024
• ISBN13: 9783642085024
• Release Date: December 2010
• Publisher: Springer
• Length: 476 Pages
• Weight: 1.52 lbs.
• Dimensions: 1.0" x 6.1" x 9.2"