Ion Sources

by H. Zhang and Huashun Zhang

Book Overview

This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing. It appeals to physicists, engineers and advanced students active in ion implantation and ion beam physics.

• Format: Hardcover
• Language: English
• ISBN: 3540657479
• ISBN13: 9783540657477
• Release Date: November 1999
• Publisher: Springer
• Length: 476 Pages
• Weight: 1.92 lbs.
• Dimensions: 1.1" x 6.1" x 9.2"