Introductory MEMS: Fabrication and Applications

by Richard A. Layton and Thomas M. Adams

Book Overview

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics...

• Format: Hardcover
• Language: English
• ISBN: 0387095101
• ISBN13: 9780387095103
• Release Date: December 2009
• Publisher: Springer
• Length: 440 Pages
• Weight: 1.76 lbs.
• Dimensions: 1.1" x 6.2" x 9.2"