Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice

by North Carolina State University and Lucille A. Giannuzzi

Book Overview

The Focused Ion Beam Instrument.- Ion - Solid Interactions.- Focused Ion Beam Gases for Deposition and Enhanced Etch.- Three-Dimensional Nanofabrication Using Focused Ion Beams.- Device Edits and Modifications.- The Uses of Dual Beam FIB in Microelectronic Failure Analysis.- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy.- FIB for Materials Science Applications - a Review.- Practical Aspects of FIB Tem Specimen Preparation.-...

• Format: Paperback
• Language: English
• ISBN: 1441935746
• ISBN13: 9781441935748
• Release Date: October 2010
• Publisher: Springer
• Length: 357 Pages
• Weight: 1.16 lbs.
• Dimensions: 0.8" x 6.1" x 9.2"