Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon

by Peter Pichler

Book Overview

Basically all properties of semiconductor devices are influenced by the distribution of point defects in their active areas. This book contains the first comprehensive review of the properties of intrinsic point defects, acceptor and donor impurities, isovalent atoms, chalcogens, and halogens in silicon, as well as of their complexes. Special emphasis is placed on compiling the structures, energetic properties, identified electrical levels and spectroscopic...

• Format: Hardcover
• Language: English
• ISBN: 3211206876
• ISBN13: 9783211206874
• Release Date: June 2004
• Publisher: Springer
• Length: 554 Pages
• Weight: 2.60 lbs.
• Dimensions: 1.0" x 6.7" x 9.7"