Hydrogen in Crystalline Semiconductors

by James W. Corbett, Michael Stavola, J.W. Corbett, et al.

This monograph arose out of the recognition of the importance of hydrogen in modern semiconductor technology. Hydrogen is a component of most chemicals used in the fabrication of electronic and photonic devices, is easily incorporated into semiconductors and it is a model impurity for studying defect reactions in solids. While writing this volume we have received a good deal of encourage- ment from our colleagues at AT&T Bell Laboratories, State University...

• Format: Paperback
• Language: English
• ISBN: 3540554912
• ISBN13: 9783540554912
• Release Date: June 1992
• Publisher: Springer
• Length: 363 Pages
• Weight: 1.16 lbs.
• Dimensions: 0.8" x 6.1" x 9.2"