High Vacuum Production in the Microelectronics Industry

by Pierre Duval

Classical applications of vacuum in the semiconductor industry have until recently involved only inert and clean gases. This situation has changed radically because the new technologies, used for deposition (LPCVD...) as well as for plasma etching, all involve the use of dangerous, poisonous, toxic or/and corrosive gases. Both the users and the manufacturers of vacuum pumps are now faced with new problems involving: Personnel safety and environment...

• Format: Hardcover
• Language: English
• ISBN: 044442878x
• ISBN13: 9780444428783
• Release Date: January 1988
• Publisher: Elsevier Publishing Company
• Length: 236 Pages
• Weight: 1.30 lbs.