High Density Plasma Sources: Design, Physics and Performance

by Oleg A. Popov

This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high...

• Format: Hardcover
• Language: English
• ISBN: 0815513771
• ISBN13: 9780815513773
• Release Date: January 1997
• Publisher: William Andrew
• Length: 465 Pages
• Weight: 1.80 lbs.
• Dimensions: 1.4" x 6.1" x 9.5"