Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology and Applications

by Werner Kern

This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. The book provides the first comprehensive and up-to-date co

• Format: Hardcover
• Language: English
• ISBN: 0815513313
• ISBN13: 9780815513315
• Release Date: January 1994
• Publisher: William Andrew
• Length: 645 Pages
• Weight: 2.90 lbs.
• Dimensions: 1.4" x 5.9" x 9.0"