Handbook of Physical Vapor Deposition (PVD) Processing

by Donald M. Mattox

This updated version of the popular handbook further explains all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the new edition remains on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications,...

• Format: Hardcover
• Language: English
• ISBN: 0815520379
• ISBN13: 9780815520375
• Release Date: May 2010
• Publisher: William Andrew
• Length: 792 Pages
• Weight: 2.90 lbs.
• Dimensions: 1.1" x 7.4" x 9.6"