Handbook of Microlithography, Micromachining and Microfabricationvol.1

by P. Rai-Choudhury

The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes,... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0819423785
• ISBN13: 9780819423788
• Release Date: March 1997
• Publisher: SPIE-International Society for Optical Engine
• Length: 776 Pages
• Weight: 3.45 lbs.
• Dimensions: 1.8" x 7.4" x 10.3"