Handbook of Ion Beam Processing Technology: Principles, Deposition, Film Modification and Synthesis

by Jerome J. Cuomo, Stephen M. Rossnagel, Harold R. Kaufman

Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.

• Format: Hardcover
• Language: English
• ISBN: 081551199X
• ISBN13: 9780815511991
• Release Date: January 1990
• Publisher: William Andrew
• Length: 456 Pages
• Weight: 2.10 lbs.
• Dimensions: 1.0" x 6.1" x 9.2"