Handbook of Ion Beam Processing Technology: Principles, Depostion, Film Modification and Synthesis (Materials Science & Process Technology S.) (Materials Science & Process Technology)

By Jerome J. Cuomo, Stephen M. Rossnagel, Harold R. Kaufman

Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.

• Format: Hardcover
• Language: English
• ISBN: 081551199X
• ISBN13: 9780815511991
• Release Date: January 1
• Publisher: William Andrew
• Length: 456 Pages
• Weight: 2.10 lbs.
• Dimensions: 1.0" x 6.1" x 9.2"