Glancing Angle Deposition of Thin Films: Engineering the Nanoscale

by Michael J. Brett, Matthew M. Hawkeye, Michael T. Taschuk

This book provides a highly practical treatment of Glancing Angle Deposition (GLAD), a thin film fabrication technology optimized to produce precise nanostructures from a wide range of materials. GLAD provides an elegant method for fabricating arrays of nanoscale helices, chevrons, columns, and other porous thin film architectures using physical vapour deposition processes such as sputtering or evaporation. The book gathers existing procedures,...

• Format: Hardcover
• Language: English
• ISBN: 1118847563
• ISBN13: 9781118847565
• Release Date: October 2014
• Publisher: Wiley
• Length: 320 Pages
• Weight: 1.35 lbs.
• Dimensions: 0.8" x 6.7" x 9.6"