Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition

by Marc J. Madou

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition...

• Format: Hardcover
• Language: English
• ISBN: 0849308267
• ISBN13: 9780849308260
• Release Date: March 2002
• Publisher: CRC Press
• Length: 752 Pages
• Weight: 4.39 lbs.
• Dimensions: 1.9" x 8.8" x 11.3"